HIGH-SENSITIVITY AND LONG-LIFE MICROCHANNEL PLATE PROCESSED BY ATOMIC LAYER DEPOSITION

Abstract As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields.Pure aluminum oxide (Al2O3) as Towels secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dark current and low lifetime which often